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Methylsilane

Catalog No. 462993 Name Sigma Aldrich
CAS Number 992-94-9 Website http://www.sigmaaldrich.com
M. F. CH6Si Telephone 1-800-521-8956
M. W. 46.14384 Fax
Purity ≥99.9% Email
Storage Chembase ID: 128388

SYNONYMS

Title
甲基硅烷
IUPAC name
methylsilane
IUPAC Traditional name
silane, methyl-

DATABASE IDS

PubChem SID 24869881
EC Number 213-598-5
MDL Number MFCD00053655
Beilstein Number 1730728
CAS Number 992-94-9

PROPERTIES

Grade electronic grade
Impurities <10 ppm Carbon dioxide (CO2)
Impurities <10 ppm Nitrogen (N2)
Impurities <100 ppm Dimethylsilane (CH3)2SiH2
Impurities <100 ppm Methylchlorosilane CH3SiH2Cl
Impurities <2 ppm Argon + Oxygen (Ar + O2)
Impurities <50 ppm Methane (CH4)
Impurities <50 ppm Silane (SiH4)
Linear Formula CH3SiH3
Purity ≥99.9%
Apperance liquid
Boiling Point -57 °C(lit.)
Melting Point -157 °C(lit.)
Vapor Density 0.628 (-58 °C, vs air)
GHS Pictograms GHS02
GHS Pictograms GHS04
GHS Pictograms GHS07
GHS Signal Word Danger
GHS Hazard statements H220-H280-H312-H332
European Hazard Symbols Highly flammable Highly flammable (F+)
European Hazard Symbols Harmful Harmful (Xn)
MSDS Link Download
Personal Protective Equipment Eyeshields, Faceshields, Gloves, half-mask respirator (US), multi-purpose combination respirator cartridge (US)
GHS Precautionary statements P210-P280-P410 + P403
RID/ADR UN 3161 2.1
Risk Statements 12-14-20/21
Safety Statements 16-24-26-36/37/39
Supplemental Hazard Statements Reacts violently with water.
Hazard Class 2.1
UN Number 3161
German water hazard class 3

DETAILS

Description (English)
Packaging
10, 20 g in ss cylinder
Features and Benefits
Methylsilane is used in the plasma-assisted CVD of silicon carbide (SiC) and as a precursor to the epitaxial growth of SiGeC alloy layers via rapid thermal CVD.1 Recent developments include the use of methylsilane as a precursor to silicon-carbon-hydrogen polymer used as photoresists.
Precursor to silicon carbide or alloy thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE).
Recommended products
Stainless steel regulators Z527416 or Z527424 are recommended.
Description (简体中文)
包装
10, 20 g in ss cylinder
Features and Benefits
甲基硅烷用于碳化硅 (SiC) 的等离子体辅助 CVD,以及作为 SiGeC 合金层通过快速热 CVD 法外延生长的前体。1最新的进展包括使用甲基硅烷作为硅-碳-氢聚合物(用作光致抗蚀剂)的前体。
通过化学气相沉积 (CVD) 和分子束外延 (MBE) 形成碳化硅或合金薄膜时的前体。
Recommended products
推荐使用不锈钢调节器 Z527416 或 Z527424。

REFERENCES