methylsilane

• ChemBase ID: 128388
• Molecular Formular: CH6Si
• Molecular Mass: 46.14384
• Monoisotopic Mass: 46.02387672
• SMILES: C[SiH3]
• Canonical SMILES: C[SiH3]
• InChI: InChI=1S/CH6Si/c1-2/h1-2H3
• InChIKey: UIUXUFNYAYAMOE-UHFFFAOYSA-N

NAMES AND DATABASE IDS

Names

• IUPAC name: methylsilane
• IUPAC Traditional name: silane, methyl-
• Synonyms: Methylsilane; Methylsilane; 甲基硅烷

Database IDs

• CAS Number: 992-94-9
• EC Number: 213-598-5
• MDL Number: MFCD00053655
• Beilstein Number: 1730728
• PubChem SID: 24869881; 162222695
• PubChem CID: 6328649
• Chemspider ID: 63613
• Wikipedia Title: Methylsilane

CALCULATED PROPERTIES

• H Acceptors: 0
• H Donor: 0
• LogD (pH = 5.5): -0.69
• LogD (pH = 7.4): -0.69
• Log P: -0.69
• Molar Refractivity: 7.9491 cm^3
• Polarizability: 5.503808 Å^3
• Polar Surface Area: 0.0 Å^2
• Rotatable Bonds: 0
• Lipinski's Rule of Five: true

PROPERTIES

Physical Property

• Solubility: Hydrolyzes in water
• Apperance: Colorless hygroscopic gas; liquid
• Melting Point: -157 °C(lit.); -157°C
• Boiling Point: -57 °C(lit.); -57°C
• Density: 0.628 g cm^-3
• Vapor Density: 0.628 (-58 °C, vs air)

Safety Information

• European Hazard Symbols: Highly flammable (F+); Harmful (Xn)
• UN Number: 3161
• German water hazard class: 3
• Hazard Class: 2.1
• Risk Statements: 12-14-20/21; R12, R14, R20/21
• Safety Statements: 16-24-26-36/37/39; S16, S24, S26, S36/37/39
• GHS Pictograms: GHS02; GHS04; GHS07
• GHS Signal Word: Danger
• GHS Hazard statements: H220-H280-H312-H332
• GHS Precautionary statements: P210-P280-P410 + P403
• Personal Protective Equipment: Eyeshields, Faceshields, Gloves, half-mask respirator (US), multi-purpose combination respirator cartridge (US)
• RID/ADR: UN 3161 2.1
• Supplemental Hazard Statements: Reacts violently with water.

Product Information

• Purity: ≥99.9%
• Grade: electronic grade
• Impurities: <10 ppm Carbon dioxide (CO2); <10 ppm Nitrogen (N2); <100 ppm Dimethylsilane (CH3)2SiH2; <100 ppm Methylchlorosilane CH3SiH2Cl; <2 ppm Argon + Oxygen (Ar + O2); <50 ppm Methane (CH4); <50 ppm Silane (SiH4)
• Linear Formula: CH3SiH3

DETAILS

Sigma Aldrich - 462993

Packaging
10, 20 g in ss cylinder
Features and Benefits
Methylsilane is used in the plasma-assisted CVD of silicon carbide (SiC) and as a precursor to the epitaxial growth of SiGeC alloy layers via rapid thermal CVD.1 Recent developments include the use of methylsilane as a precursor to silicon-carbon-hydrogen polymer used as photoresists.
Precursor to silicon carbide or alloy thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE).
Recommended products
Stainless steel regulators Z527416 or Z527424 are recommended.