Tetrakis(ethylmethylamido)titanium(IV)

• Catalog No.: 473537
• CAS Number: 308103-54-0
• M. F.: C12H32N4Ti
• M. W.: 280.27628
• Purity: ≥99.99%

SYNONYMS

• Title: 四(乙基甲基胺基)钛(IV)
• IUPAC name: ethyl(methyl){tris[ethyl(methyl)amino]titanio}amine
• IUPAC Traditional name: ethyl(methyl){tris[ethyl(methyl)amino]titanio}amine
• Synonyms: Tetrakis(ethylmethylamino)titanium(IV); 四(乙基甲基氨基)钛(IV)

DATABASE IDS

• PubChem SID: 24870915
• MDL Number: MFCD00799591
• CAS Number: 308103-54-0

PROPERTIES

• Grade: electronic grade
• Linear Formula: [(CH3C2H5)N]4Ti
• Purity: ≥99.99%
• Apperance: liquid
• Apperance: liquid
• Boiling Point: 80 °C/0.1 mmHg(lit.)
• Density: 0.923 g/mL at 25 °C(lit.)
• Flash Point: 2 °C
• Flash Point: 35.6 °F
• GHS Signal Word: Danger
• GHS Hazard statements: H225-H260-H314
• European Hazard Symbols: Flammable (F)
• European Hazard Symbols: Corrosive (C)
• Personal Protective Equipment: Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
• GHS Precautionary statements: P210-P223-P231 + P232-P280-P370 + P378-P422
• RID/ADR: UN 3398 4.3/PG 1
• Risk Statements: 11-14-34
• Safety Statements: 16-26-36/37/39-43-45
• Storage Temperature: 2-8°C
• Supplemental Hazard Statements: Reacts violently with water.
• Hazard Class: 4.3
• UN Number: 3398
• Packing Group: 1
• German water hazard class: 3

DETAILS

Description (English)

Application
Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD).1
General description
Atomic number of base material: 22 Titanium
Other Notes
Please inquire for bulk quantity, pricing, and packaging options.
Packaging
5 g in ampule

Description (简体中文)

Application
在有机金属化学气相沉积 (OMCVD) 中作为一氮化钛 (TiN) 薄膜的前体。1
General description
Atomic number of base material: 22 Titanium
Other Notes
请咨询批量、价格和包装选择。
包装
5 g in ampule